120 credits in science/engineering. One of these alternatives: 1) Solid state physics F and attended course in Semiconductor Electronics, 2) Materials chemistry and attended course in Solid state physics I, 3) Introduction to materials engineering or Introduction to material science (10 credits). Proficiency in English equivalent to the Swedish upper secondary course English 6.
Scaling of phenomena and properties when dimensions decrease. Materials properties and function, especially on silicon. Basic manufacturing methods as lithography, deposition, wet and dry etching, and bonding, and important factors as selectivity, etching speed and yield. Properties and applications of microsensors and microactuators. Industrial and economic aspects.
